PFA Bushing technology builds a solid barrier for anti-corrosion and ultra-clean in the semiconductor industry

Jiangsu RANA has been deeply engaged in fluorine materials for more than 30 years, and its PFA branch port technology builds a solid barrier for anti-corrosion and ultra-clean in the semiconductor industry

News from Taizhou As a deep cultivator in the domestic fluorine material product field, Jiangsu RANA Fluorine Material Technology Co., Ltd. (hereinafter referred to as "Jiangsu RANA") has always focused on the R&D and manufacturing of semiconductor-grade and electronic-grade PTFE, PFA, and ECTFE fluorine material products since its establishment in 1994. With 32 years of technical accumulation, its PFA single flange liner (commonly known as "PFA branch port" in the industry) has become the core standard component of equipment under extreme working conditions in the chemical and semiconductor industries, providing key support for industry anti-corrosion and ultra-clean fluid transmission.

The standard name of PFA branch port is PFA single flange liner / flanged sleeve / container inserted branch port. It is an integrated lining component made of high-purity PFA resin through integral molding or injection molding. Its core structure is a straight-through sleeve with a 2~5mm radial flange at one end, and the length can be customized according to needs, which is completely different from conventional pipe joints.

According to technical experts of Jiangsu RANA, this component has three core functions: medium isolation, connection transition, and flow channel optimization. It can fully cover the inner wall and edge of the container opening, preventing corrosive media from contacting the metal shell; the flange surface is directly connected to external pipeline valves, realizing perfluorinated sealing; the inner wall of the sleeve is smooth and seamless, avoiding medium retention and pollution. Its service life is 5~10 times longer than that of traditional PTFE-lined gaskets, and the leakage risk is reduced by more than 90%.

Relying on its self-built R&D center and industry-university-research cooperation with universities, Jiangsu RANA's PFA branch port meets the strict semiconductor-grade standards: the metal ion precipitation is less than 1ppb, TOC precipitation is less than 0.1μg/cm², and the inner wall roughness Ra is less than 0.2μm. It can withstand strong corrosive media such as hydrofluoric acid and concentrated sulfuric acid at 150℃, with a corrosion rate of less than 0.01mm/year, and has a long-term temperature resistance range of -80℃~+260℃. It has no cracking or deformation after 100 cold and hot cycles, and has passed SEMI F57 and FDA certifications. It is fully suitable for high-end scenarios such as semiconductor manufacturing processes below 14nm and aseptic production in biomedicine.